Training

Basic operation of a scanning electron microscope (XL30 FEG-SEM)

The XL30 microscope is a new-generation, fully computer-controlled SEM, with optimum performance for both imaging and microanalysis of conductive and/or coated specimens. The instrument is an excellent tool for both the experienced and first-time user. The XL30 SEM possesses modest frame store and image enhancement hardware and allows automated stage control, image capture, and image transfer from its computer through Internet. Images can be saved to the standard TIFF file format for use in a variety of other programs for off-line image enhancement and manipulation. The sample stage can handle specimens up to 25 mm in diameter. The schottky field-emission electron source enables the attainment of much higher brightness source with higher resolution images than a conventional LaB6 filament SEM. Useful magnifications in excess of 200,000 times are obtainable, which translate to a resolution of 3.5 nm at an accelerating voltage of 30 kV.

References

1. J. Goldstein et al. Scanning Electron Microscopy and X-ray Microanalysis (Plenum, New York, 1992).
2. L. Reimer, Scanning Electron Microscopy, Physics of Image Formation and Microanalysis (Springer Series in Optical Sciences, Vol. 45, Springer, Berlin, 1998).

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Operation manual for the XL30 FEG-SEM
XL30 CL instructions