Operation of Transmission Electron Microscope (Philips CM200 TEM)
With a field-emission-gun, this microscope provides structural information
at better than 0.2 nm spatial resolution, and an electron probe of 1 nm with
energy up to 200KeV.
In most crystalline inorganic materials, including ceramics, semiconductors
and metals, the positions of individual atomic columns can be resolved, at least
in low-index zones. When recorded under optimum conditions, electron micrographs
can be directly interpreted in terms of the projected crystal potential. In
other cases, image simulations are necessary to match proposed structures to
image features. Dynamic events induced by the electron beam or indirectly with
a heating holder can be followed by videotape recording from a TV-rate image
pick-up system. At lower resolution, amplitude contrast images can be used to
observe material features in the 1µm-0.5nm range. In this microscope,
the electron nano-diffraction and nano-analysis method can be used to obtain
localized structural and elemental information at nanoscale. With a 1 nm incident
electron probe, the information from the region only covers one or two unit
cells can be readily collected.
References
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